rus
Issue #8/2025
E. S. Zhimuleva, P. S. Zavyalov, A. V. Soldatenko, I. A. Azarov, E. V. Spesivtsev, D. R. Khakimov, S. R. Averina
Mirror Lens for Industrial Ellipsometers as a Part of Integrated Circuit Production Lines
Mirror Lens for Industrial Ellipsometers as a Part of Integrated Circuit Production Lines
DOI: 10.22184/1993-7296.FRos.2025.19.8.634.640
This article proposes a common concept for an industrial ellipsometer designed to control the film thickness of functional and auxiliary layers being the basis of integrated circuit designs. The optical design of the ellipsometer with mirror lenses and an experimental study of the mirror optics are described. The mathematical modeling is supported by experimental data.
Tags: integrated circuits mirror microlenses optical design spectral ellipsometry зеркальные микрообъективы интегральные схемы оптический дизайн спектральная эллипсометрия
Subscribe to the journal Photonics Russia to read the full article.
This article proposes a common concept for an industrial ellipsometer designed to control the film thickness of functional and auxiliary layers being the basis of integrated circuit designs. The optical design of the ellipsometer with mirror lenses and an experimental study of the mirror optics are described. The mathematical modeling is supported by experimental data.
Tags: integrated circuits mirror microlenses optical design spectral ellipsometry зеркальные микрообъективы интегральные схемы оптический дизайн спектральная эллипсометрия
Subscribe to the journal Photonics Russia to read the full article.
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