rus
Issue #2/2023
M. A. Bogachev, D. D. Vasiliev, K. M. Moiseev, M. V. Nazarenko
Processing of Optical Crystals and LEDs in Glow Discharge Plasma
Processing of Optical Crystals and LEDs in Glow Discharge Plasma
DOI: 10.22184/1993-7296.FRos.2023.17.2.108.112
Glow discharge plasma treatment is increasingly being used to clean the surfaces of materials from contamination, reduce surface roughness, increase surface energy and surface modification. The article presents the results of plasma processing of high-frequency and low-frequency gas discharge in the MPC RF‑12 plasma processing unit of optical crystal disks and cassettes of solid-state LEDs. The influence of parameters and modes of plasma treatment, namely power, time and type of working gas on the quality of treatment is estimated. It is shown that plasma treatment is a powerful tool for influencing the surface properties of optical crystals, is effective for removing metal oxide layers and is safe for adhesive joints of crystals with a base.
Tags: cleaning of optical elements low-temperature pulsed plasma optical crystals plasma surface treatment solid-state leds низкотемпературная импульсная плазма оптические кристаллы очистка оптических элементов плазменная обработка поверхности твердотельные светодиоды
Subscribe to the journal Photonics Russia to read the full article.
Glow discharge plasma treatment is increasingly being used to clean the surfaces of materials from contamination, reduce surface roughness, increase surface energy and surface modification. The article presents the results of plasma processing of high-frequency and low-frequency gas discharge in the MPC RF‑12 plasma processing unit of optical crystal disks and cassettes of solid-state LEDs. The influence of parameters and modes of plasma treatment, namely power, time and type of working gas on the quality of treatment is estimated. It is shown that plasma treatment is a powerful tool for influencing the surface properties of optical crystals, is effective for removing metal oxide layers and is safe for adhesive joints of crystals with a base.
Tags: cleaning of optical elements low-temperature pulsed plasma optical crystals plasma surface treatment solid-state leds низкотемпературная импульсная плазма оптические кристаллы очистка оптических элементов плазменная обработка поверхности твердотельные светодиоды
Subscribe to the journal Photonics Russia to read the full article.
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