rus
Issue #4/2022
S. V. Sidorova, K. M. Moiseev, D. D. Vasilev, M. V. Nazarenko, I. V. Mikhailova
Plasma Treatment of Material Surfaces for the Photonics Applications
Plasma Treatment of Material Surfaces for the Photonics Applications
DOI: 10.22184/1993-7296.FRos.2022.16.4.288.295
Plasma treatment is a powerful tool for cleaning the material surface from contamination, reducing the surface roughness, increasing the surface energy and surface modification. The use of plasma processing systems in the process equipment chain is a global trend. The article presents the results of high-frequency gas discharge plasma processing in the MPC RF‑12 plasma treatment systems. The influence of plasma treatment parameters and modes, namely power and time, on the treatment quality, determined by the contact angle, is studied. It is shown that in some cases it is possible to obtain the similar results with different ratios of plasma treatment parameters.
Tags: cleaning of optical elements low-temperature pulsed plasma plasma surface treatment technology for manufacturing optical components низкотемпературная импульсная плазма очистка оптических элементов плазменная обработка поверхности технология изготовления оптических компонентов
Subscribe to the journal Photonics Russia to read the full article.
Plasma treatment is a powerful tool for cleaning the material surface from contamination, reducing the surface roughness, increasing the surface energy and surface modification. The use of plasma processing systems in the process equipment chain is a global trend. The article presents the results of high-frequency gas discharge plasma processing in the MPC RF‑12 plasma treatment systems. The influence of plasma treatment parameters and modes, namely power and time, on the treatment quality, determined by the contact angle, is studied. It is shown that in some cases it is possible to obtain the similar results with different ratios of plasma treatment parameters.
Tags: cleaning of optical elements low-temperature pulsed plasma plasma surface treatment technology for manufacturing optical components низкотемпературная импульсная плазма очистка оптических элементов плазменная обработка поверхности технология изготовления оптических компонентов
Subscribe to the journal Photonics Russia to read the full article.
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