DOI: 10.22184/1993-7296.FRos.2021.15.5.396.409

The article presents the results of studying the possibilities of reducing the response time (time constant of thermal relaxation) to the thermal effect of a bolometric sensor. The analysis was carried out within the framework of the generally accepted theory of absorption of IR radiation and thermophysical processes occurring in membrane MEMS structures. The results of modeling the optimal design of high-performance microbolometric elements, taking into account the requirements of specific applications and its implementation using modern technological processes of formation, are presented. The discovered regularities will be applied in the production of microbolometers of the Astron family.


Разработка: студия Green Art